Case Study: Lam Research Corporation speeds chip development with COMSOL Multiphysics

Lam Research Corporation optimizes wafer control with Comsol

The customer, Lam Research Corporation, a manufacturer of semiconductor processing equipment, faced challenges with defects caused by temperature fluctuations and wafer deformations during their precise manufacturing processes. They utilized COMSOL Multiphysics from vendor Comsol to understand these complex physics issues.

Using Comsol's simulation software, Lam Research was able to model and analyze the causes of defects, optimize their tool's heating system for uniform temperature control, and accurately predict wafer buckling. This solution from Comsol enabled them to precisely match displacement to errors and significantly improve their manufacturing performance.

Lam Research Corporation