Case Study: INFICON achieves more precise, robust ion gauge performance with COMSOL Multiphysics

INFICON improves ion gauge measurement uncertainty below 1% with Comsol

INFICON, an instrument manufacturer, faced the challenge of developing a more precise, robust, and reproducible ionization gauge for measuring pressure in high-vacuum and ultra-high-vacuum environments. Existing gauges were too sensitive to heat and handling, leading to unacceptably high measurement uncertainty and a frequent need for recalibration.

Using COMSOL Multiphysics software for multiphysics modeling and simulation, INFICON was able to test and refine their new gauge design. The solution from COMSOL enabled INFICON to analyze electron and ion paths, leading to a new, more durable gauge prototype. The resulting Ion Reference Gauge 080 achieved a measurement uncertainty of below 1%, performed eight times better in sensitivity, and demonstrated a 13-times improvement in sensitivity repeatability compared to the benchmark design.

INFICON