Case Study: EPFL achieves a compact silicon photonic MEMS phase shifter with COMSOL Multiphysics

EPFL develops a 60 μm × 44 μm silicon photonic MEMS phase shifter with Comsol

The Swiss Federal Institute of Technology Lausanne (EPFL) aimed to develop a smaller, more reliable silicon photonic MEMS phase shifter to boost the speed and capacity of optical fiber networks. Their challenge was to design a nanoscale mechanism that could precisely modulate an optical signal with minimal loss, a complex task requiring the optimization of both optical and electromechanical performance. To achieve this, engineers at EPFL used multiphysics simulation software from Comsol.

Using Comsol Multiphysics® with the RF and Structural Mechanics Modules, the team conducted parallel simulations to model the optical performance and electromechanical actuation of their design. This approach allowed them to determine the precise voltage required to induce the desired phase shift and to optimize the device's physical structure. The result was a robust proof-of-concept phase shifter with a tiny footprint of 60 μm × 44 μm that is achievable with existing manufacturing processes, providing a foundational building block for future high-performance photonic networks.

Swiss Federal Institute of Technology Lausanne (epfl)