Case Study: AltaSim Technologies advances capacitively coupled plasma analysis with COMSOL Multiphysics

AltaSim Technologies advances CCP analysis with Comsol using 1D and 2D simulations

The customer, AltaSim Technologies, faced the challenge of analyzing capacitively coupled plasma (CCP), a process critical for microelectronics manufacturing. The dynamic behavior of the plasma and the large number of RF cycles required to reach a steady state made this analysis difficult. They used Comsol Multiphysics software from the vendor Comsol to address this complex multiphysics problem.

Comsol provided the simulation environment that enabled AltaSim Technologies to perform one- and two-dimensional simulations of low-frequency RF discharges. Using Comsol Multiphysics, AltaSim developed simulations for both Maxwellian and non-Maxwellian cases. This solution allows them to assist in the development of new CCP processing technology for their clients.

AltaSim Technologies