Case Study: SilMach achieves breakthrough MEMS efficiency (100 W/g actuators) with ANSYS Multiphysics

SilMach - Customer Case Study

SilMach, a Besançon, France–based MEMS design, simulation and prototyping R&D spin‑off from LMARC/IMFC, needed to avoid costly physical prototypes by accurately predicting complex, coupled multiphysics behavior in their silicon‑based sensors and actuators. To meet that challenge they adopted ANSYS Multiphysics from ANSYS to provide the advanced coupled‑physics simulation capabilities required.

Using ANSYS Multiphysics, SilMach simulated mechanical deformation, nonlinear contact, acoustic, electrostatic, thermal and fluid damping interactions to predict device performance before manufacture. ANSYS enabled SilMach to produce much more efficient devices — for example, a conventional electromagnetic actuator delivering 100 W/g compared with about 1 W/g for standard devices — and to advance research into MEMS microturbines, flap arrays and flapping‑wing propulsion.